Silane
(SiH4)
Other Names:
Silicane; Silicon hydride (SiH4); Silicon tetrahydride; Monosilane; Silicon hydride; UN 2203
| Analyte | Detection Limit(s) DL(s) (ppm) |
Method/Technique(s) Method/ Technique(s) |
|---|---|---|
|
Argon Argon (Ar) |
0.1 0.1 ppm |
GC–PDID |
|
Arsine Arsine (AsH3) |
0.002 0.002 ppm |
GC–ICP–MS |
|
Carbon dioxide Carbon dioxide (CO2) |
0.1 0.1 ppm |
FTIR |
|
Carbon monoxide Carbon monoxide (CO) |
0.1 0.1 ppm |
GC–AED |
|
Disilane Disilane (Si2H6) |
0.1 0.1 ppm |
GC–AED |
|
Ethylsilane Ethylsilane (C2H8Si) |
0.1 0.1 ppm |
GC–AED |
|
Hydrocarbons Hydrocarbons (C2 – C5) |
0.1 0.1 ppm |
GC–FID |
|
Hydrogen Hydrogen (H2) |
0.1 0.1 ppm |
GC–PDID |
|
Methane Methane (CH4) |
0.1 0.1 ppm |
GC–AED |
|
Methylsilane Methylsilane (CH3SiH3) |
0.1 0.1 ppm |
GC–MS |
|
Nitrogen Nitrogen (N2) |
0.1 0.1 ppm |
GC–PDID |
|
Oxygen Oxygen (O2) |
0.1 0.1 ppm |
GC–PDID |
|
Phosphine Phosphine (PH3) |
0.02 0.02 ppm |
GC–ICP–MS |
|
Water vapor Water vapor (H2O) |
0.5 – 2.0 0.5 – 2.0 ppm |
FTIR |
Please keep in mind that these detection limits are only a guide. Many projects are highly unique and we recommend discussing your project with us over the phone. When you're ready to send your sample, visit Getting Started for important information.
