Dichlorosilane
(SiCl2H2)
Other Names:
Silicic dichloride dihydride
Analyte | Detection Limit(s) DL(s) (ppm) |
Method/Technique(s) Method/ Technique(s) |
---|---|---|
Argon Argon (Ar) |
0.1 0.1 ppm |
GC–PDID |
Carbon dioxide Carbon dioxide (CO2) |
0.05 0.05 ppm |
GC–PDID |
Carbon monoxide Carbon monoxide (CO) |
0.05 0.05 ppm |
GC–PDID |
Carbon tetrafluoride Carbon tetrafluoride (CF4) |
0.05 0.05 ppm |
GC–PDID |
Chlorosiloxanes |
10 10 ppm |
GC/MS, GC–ICP–MS |
Hydrocarbons Hydrocarbons (C2 – C6) |
0.1 0.1 ppm |
GC–FID |
Hydrogen Hydrogen (H2) |
0.05 0.05 ppm |
GC–PDID |
Hydrogen chloride Hydrogen chloride (HCl) |
0.5 0.5 ppm |
FTIR |
Hydrogen fluoride Hydrogen fluoride (HF) |
0.2 0.2 ppm |
FTIR |
Methane Methane (CH4) |
0.05 0.05 ppm |
GC–PDID |
Monochlorosilane Monochlorosilane (SiH3Cl) |
10 10 ppm |
GC/MS, GC–ICP–MS |
Nitrogen Nitrogen (N2) |
0.1 0.1 ppm |
GC–PDID |
Oxygen Oxygen (O2) |
0.1 0.1 ppm |
GC–PDID |
Silane Silane (SiH4) |
10 10 ppm |
GC/MS, GC–ICP–MS |
Silicon tetrachloride Silicon tetrachloride (SiCl4) |
10 10 ppm |
GC/MS, GC–ICP–MS |
Trichlorosilane Trichlorosilane (SiHCl3) |
10 10 ppm |
GC/MS, GC–ICP–MS |
Water vapor Water vapor (H2O) |
1–2 1–2 ppm |
FTIR |
Please keep in mind that these detection limits are only a guide. Many projects are highly unique and we recommend discussing your project with us over the phone. When you're ready to send your sample, visit Getting Started for important information.